Two-dimensional Fluid Model of DC and RF Plasma Discharges in Magnetic Field
نویسندگان
چکیده
The hydrodynamic equations of continuity and momentum for electrons and ions along with the electrostatic field equation are solved numerically using a self-consistent finite-element algorithm in the low-pressure, high frequency regime. The plasma formation over a flat plate is investigated for three different cases. The twodimensional numerical algorithm is first benchmarked with published literature for plasma formed between symmetric electrodes in nitrogen gas. Discharge characteristics of plasma for an electrode-insulator configuration are then analyzed under steady and transient conditions using argon as a working gas. The effect of magnetic field on electric potential and charge difference is studied for an infinitesimally thin electrode. The magnetic field distorts the stream-wise distribution because of strong y-momentum v×B coupling. Finally, the shape effects of insulator-conductor edge for an electrode of finite thickness have been compared using a 90 shoulder and a 45 chamfer. The 90 chamfer displays a stronger body force created due to plasma in the downward and forward directions.
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